Comparison ledger
Applied Materials 0010-03254 E Chuck, SUSS MicroTec Gamma 200 Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Gamma 200 SpraySUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | SUSS MicroTec GAMMA |
| Specifications | ||
| Configuration | — | Coat Module (2)[1] |
| Wafer size | — | 8 inch[1] |
| Coat modules | — | 2[1] |
| Develop modules | — | 2[1] |
| Vapor prime (HMDS) module | — | 1[1] |
| Oven hot plates | — | 3[1] |
| Cool plates | — | 2[1] |
| Overhead HEPA filter | — | Yes[1] |
| High viscosity photoresist pumps | — | Yes[1] |
| Vintage | — | 2014[1] |