Waferpedia

Comparison ledger

0010-03254 E ChuckversusF10-RT

Applied Materials 0010-03254 E Chuck, Filmetrics F10-RT, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
F10-RTFilmetrics
OEMApplied MaterialsFilmetrics
Category——
Wafer size—6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Filmetrics F10-RT
Specifications
Instrument type—optical spectrometer[1]
Use in source example—measured reflectivity of a 9-period SiO2/Ta2O5 DBR[2]
Example measurement wavelength—high reflectivity at approximately 1050 nm[2]
Alternate name—F10RT[1]
Measurement capability—Reflectivity[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]wiki.nanofab.ucsb.eduwiki.nanofab.ucsb.edu
  2. [2]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu