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Comparison ledger

0010-03254 E ChuckversusDCS1440

Applied Materials 0010-03254 E Chuck, Disco DCS1440, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
DCS1440Disco
OEMApplied MaterialsDisco
Category——
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Disco DCS1440
Specifications
Mentioned function—atomizing cleaning[1]
Associated equipment—DAG810 automatic surface grinder[1]
Maximum workpiece size—Φ8 inch[2]
Application frame—2-8-1[3]
Table RPM—100 to 3,000 min⁻¹[2]
Setting time for cleaning/drying—0 to 999 sec[2]
Cleaning nozzle speed—1 to 37.5 °/sec[2]
Cleaning range—Φ365 mm (up to 250×250 mm)[2]
Cleaning pressure range—2.3 to 11.8 MPa[2]
Equipment dimensions (W×D×H)—400 × 600 × 1,220 mm[2]
Dry mass—Approx. 124 kg[2]
Maximum square workpiece (optional)—250×250 mm[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]disco.co.jpdisco.co.jp
  3. [3]disco.com.sgdisco.com.sg