Comparison ledger
Applied Materials 0010-03254 E Chuck, Branson IPC 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IPC 3000Branson |
|---|---|---|
| OEM | Applied Materials | Branson |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Branson IPC 3000 |
| Cited variants | — |
|
| Specifications | ||
| Plasma Source | — | RF, 13.56 MHz[2] |
| Max RF Power | — | Up to 1200W (with ENI RF Generator or equivalent)[2] |
| Operating Pressure Range | — | 0.1 to 5 torr[3] |
| Reactor Chamber Material | — | Quartz[1] |
| Gas Flow Meter Range | — | 0 to 900 cc/min[3] |
| Input Power | — | Nominal 115V, 20A service; 15A max under load; IPC 3100 uses 208-240V 20A 3-wire circuit[3] |