Waferpedia

Comparison ledger

M Prep 3versus12 Lapper

Allied High Tech M Prep 3, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
M Prep 3Allied High Tech
12 LapperLapmaster
OEMAllied High TechLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAllied High Tech M Prep 3—
Specifications
ConfigurationParts Unit[1]—
OEMAllied High Tech[1]—
ModelM Prep 3[1]—
CategoryCMP[2]—
Tool typeGrinder / Polisher[1]—
Wafer size8 inch[1]—
Outside plate diameter—12 inches[3]
Lapping Speed Range—0 to 60 rpm[4]
Wafer Size Compatibility—4 inches or smaller[3]
Input Voltage—110 V[3]
Frequency—60 Hz[3]
Phase—1[3]
Number of Rings—3[3]
Number of Weights—3[3]
Includes Slurry System—Yes[3]
Includes Timer—Yes[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]jmind.comjmind.com
  4. [4]etd.ohiolink.eduetd.ohiolink.edu