Comparison ledger
ABM -407B-2-S-CE-S293 Robot, LPKF U 4 Proto, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | U 4 ProtoLPKF | |
|---|---|---|
| OEM | ABM | LPKF |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | LPKF U 4 Proto |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Laser class | — | 1[2] |
| Max material size (X x Y x Z) | — | 229 mm x 305 mm x 10 mm (9" x 12" x 0.4")[2] |
| Laser wavelength | — | 355 nm[2] |
| Laser pulse frequency | — | 25 kHz – 300 kHz[2] |
| Structuring speed | — | 200 mm/s (7.8"/s) on 18 μm / ½ oz Cu on FR4[2] |
| Cutting speed | — | 200 mm/s (7.8"/s) for 0.5 mm (0.02") FR4*[2] |
| Diameter of focused laser beam | — | 20 μm[2] |
| Minimum line / space | — | 50 μm/20 μm (2 mil/0.8 mil), on laminated substrate (18 μm Cu)[2] |
| Accuracy | — | ± 1.98 μm (± 0.08 mil) mechanical resolution scanfield[2] |
| Dimensions (W x H x D) | — | 910 mm x 1650 mm x 795 mm (35.8" x 65" x 31.3"); height with open door 1765 mm (69.5")[2] |
| Weight | — | 340 kg[2] |
| Electrical consumption | — | 110 V – 230 V; 1.4 kW[2] |
| Required compressed air supply | — | Min. 6 bar (87 psi), min. 230 l/min (8.12 cfm)[2] |
| Laser source power | — | up to 6 W[3] |
| Calibration | — | better than 10 μm across 9" x 12" working area/vacuum table[3] |