Comparison ledger
ABM -407B-1-S-CES293 Robot, Rigaku 3640 Wafer Disk Analyzer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 3640 Wafer Disk AnalyzerRigaku | |
|---|---|---|
| OEM | ABM | Rigaku |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1977– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Rigaku 3640 Wafer Disk Analyzer |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | 3640 Wafer / Disk Analyzer[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Make | — | Rigaku[2] |
| Wafer size | — | 8 inch[2] |
| Sample size | — | 8" max.[3] |
| Sample stage | — | XYθ driving system, spin mechanism (for center measurement)[3] |
| Elements for simultaneous analysis | — | 16 elements max.[3] |
| Goniometer | — | Fixed type goniometer for each element; scanning type goniometer for Ti through U[3] |
| Collimator | — | 2 kinds for automatic exchange; selectable from 5, 10, 15 and 20 mm dia.[3] |
| Automatic vacuum degree controller | — | 13 Pa ± 1 Pa (APC: automatic pressure controller)[3] |
| Temperature stabilizer | — | Available[3] |
| X-ray tube | — | Rh target, 3 kW[3] |
| X-ray generator | — | Maximum output: 3 kVA[3] |
| Heat exchanger | — | Distilled water recirculation system (with ion exchange resin)[3] |
| Vacuum pump | — | Dry pump (QDP-80)[3] |
| Cassette-to-cassette | — | Optional[3] |
| Orientation flat/notch | — | Adjustable[3] |
| Software | — | Multiwindow/multitask FP method for multilayer thin film wafer measuring direction setting program[3] |
| Mapping | — | Optional[3] |
| Personal computer | — | DOS/V compatible[3] |
| Operating system | — | OS/2 Warp[3] |
| Display/peripherals | — | 15" color CRT, ink jet printer[3] |