Comparison ledger
ABM -407B-1-S-CES293 Robot, Nikon VMZ R 3020, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VMZ R 3020Nikon | |
|---|---|---|
| OEM | ABM | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Nikon VMZ R 3020 |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | VMZ R 3020[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | Nexiv Microscope[3] |
| Manufacturer | — | Nikon[3] |
| Wafer sizes | — | 8, 12 inch[3] |
| Tool type | — | automated measuring system[4] |
| Stroke | — | 300 x 200 x 200 mm[4] |
| Stroke (X x Y x Z) | — | 300 x 200 x 200 mm[1] |
| Stroke at low magnification with type TZ | — | 250 x 200 x 200 mm[1] |
| Power source | — | AC100 - 240V, 50 / 60Hz[5] |
| Power consumption | — | 5A-2.5A[1] |
| Minimum readout | — | 0.01 μm[1] |
| Maximum workpiece weight | — | 20 kg[1] |
| Measuring uncertainty EUX, MPE EUY, MPE | — | 1.2+4L/1000 μm[1] |
| Measuring uncertainty EUXY, MPE | — | 2+4L/1000 μm[1] |
| Z measurement uncertainty EUZ, MPE | — | 1.2+5L/1000 μm[1] |
| Camera | — | Black & white 1/3” CCD, color 1/3” CCD (option) for type 1, 2 and A only[1] |
| Auto focus | — | TTL laser AF and vision AF for type 1, 2, 3, 4 and TZ; vision AF standard and laser AF optional for type A[1] |
| Illumination | — | LED episcopic and diascopic illuminators; LED 8-segment ring illuminator; darkfield illuminators for type TZ[1] |
| Dimensions and weight, main unit & table | — | 700 x 730 x 1795 mm; 245 kg[1] |
| Dimensions and weight, controller | — | 190 x 450 x 440 mm; 15 kg[1] |
| Footprint | — | 2100 x 1100 mm[1] |