Comparison ledger
YES 6112, YES PB8-2P-CP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6112YES | PB8-2P-CPYES |
|---|---|---|
| OEM | YES | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | 8 in. wafers | 8 in. wafers |
| Process node | — | — |
| Introduced | 2000 | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | YES 6112 | YES PB8-2P-CP |
| Cited variants | — | |
| Specifications | ||
| Capacity | 4 cassettes of 8 in. wafers[2] | — |
| Cleanliness | < 10 x 0.5 - micron particles per 8-in. wafer[2] | — |
| Throughput | 2 full loads/hr.[2] | — |
| HMDS usage | <7 ml/200 wafers (>50 prime cycles/pint)[2] | — |
| Temperature | 160°C max[2] | — |
| Outer system | stainless steel[2] | — |
| Manufacturer | — | Yield Engineering Systems (YES)[3] |
| Model | — | YES-PB8-2P-CP[3] |
| Product family | — | Polyimide Bake Ovens / High Temperature Vacuum Bake/Cure Ovens for BCB/Polyimide[1] |
| Wafer capacity | — | 2 cassettes of 8 in. wafers[1] |
| Chamber configuration | — | Single compartment[1] |
| Chamber description | — | 9.9 in. x 25.7 in. deep chamber[1] |
| Controller | — | CTC Controller with Color Touchscreen[1] |
| Listed options | — | Cooling Package[1] |
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