Comparison ledger
Varian 160 XP Ion, Varian E 500 EHP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XP IonVarian | E 500 EHPVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP Ion | Varian E 500 EHP |
| Specifications | ||
| Configuration | 150mm High Current IMP[1] | — |
| Voltage | — | 208 V[2] |
| Frequency | — | 50 Hz[3] |
| Phase | — | 3 Phase[2] |
| Category | — | Ion Implantation[4] |
| Implanter type | — | Medium current implanter[5] |
| Maximum beam energy | — | 250 kV[2] |
| Wire configuration | — | 5 Wire[2] |
| Wafer size | — | 6"[2] |
| Convertible to 8" | — | Yes[5] |
| Thin wafer handling kit | — | Included[5] |
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