Comparison ledger
Varian 0332 F 9453 302 Diffusion, YES 1518SM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1518SMYES | |
|---|---|---|
| OEM | Varian | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | YES 1518SM |
| Cited variants | — | |
| Specifications | ||
| Asset Number | 142841[2] | — |
| Last Confirm Date | October 14, 2025[3] | — |
| Model | — | YES-1518SM[1] |
| Function | — | Vapor Prime, Image Reversal, and Silylation[1] |
| Silylation capacity | — | Above listed capacities for Vapor Prime and Image Reversal, or Silylation on 4 cassettes of 5 or 6-inch wafers or 6 cassettes of 4-inch wafers[1] |
| Throughput | — | 2 full loads/hr[1] |
| HMDS usage | — | < 7 ml/200 wafers (>50 prime cycles/pint)[1] |
| Temperature stability | — | 160°C max ± 2°C[1] |
| Chamber dimensions | — | 20-in (508mm) high, 20-in (508mm) wide, 15.12-in (384mm) deep[1] |
| System dimensions | — | 26-in (660mm) high, 33.75-in (858mm) wide, 25-in (635mm) deep[1] |
| Stand-alone weight | — | 350 pounds[1] |
| International shipping weight | — | 500 pounds[1] |
| Version | — | 200mm[4] |
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