Comparison ledger
Tegal 1512e, Tokyo Electron Unity ME 8555 SSS Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | Unity ME 8555 SSS DryTokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tokyo Electron Unity |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | Dry Etcher[2] |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | 3 Ch Oxide[2] |
| Manufacturer | — | Tokyo Electron[3] |
| Model | — | Unity ME 8555 SSS[2] |
| Wafer size | — | 8 inch[2] |
| Software version | — | 1.00[2] |
| Condition note | — | Missing parts[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →