Waferpedia

Comparison ledger

MJB-3versus1000 Family

SUSS MicroTec MJB-3, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MJB-3SUSS MicroTec
1000 FamilyUltratech
OEMSUSS MicroTecUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec MJB-3Ultratech 1000 Family
Specifications
OEMSUSS MicroTec[1]—
ModelMJB3[1]—
Equipment typeMask Aligner[1]—
ApplicationPhotolithographic patterning[1]—
Tool categoryContact Aligners (SUSS MJB-3)[2]—
Tool type—Photolithography step-and-repeat 1X stepper[3]
Optical design—Wynne Dyson[3]
Magnification—1X[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu
  2. [2]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  3. [3]en.wikipedia.orgen.wikipedia.org