Comparison ledger
SUSS MicroTec ACS 300, SUSS MicroTec ACS 300 Gen 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ACS 300SUSS MicroTec | ACS 300 Gen 2SUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | Resist Processing | Thermal / Diffusion |
| Wafer size | — | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec ACS 300 | SUSS MicroTec ACS 300 |
| Specifications | ||
| Configuration | Developer (4)[1] | Includes:[2] |
| Wafer size | — | System tooling for 200/300 mm semi spec wafer sizes[2] |
| OEM | — | SUSS MicroTec[3] |
| Model | — | ACS 300 Gen 2[4] |
| Equipment type | — | Coater / Developer[2] |
| Automation | — | fully automatic[3] |
| Architecture | — | modular[3] |
| Process modes | — | spin-coating and spray-coating[3] |
| Integrated functions | — | coat, bake, and develop modules[2] |
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