Waferpedia

Comparison ledger

150 e MaskversusMJB-3

SUSS MicroTec 150 e Mask, SUSS MicroTec MJB-3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
150 e MaskSUSS MicroTec
MJB-3SUSS MicroTec
OEMSUSS MicroTecSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec 150 e MaskSUSS MicroTec MJB-3
Specifications
OEM—SUSS MicroTec[1]
Model—MJB3[1]
Equipment type—Mask Aligner[1]
Application—Photolithographic patterning[1]
Tool category—Contact Aligners (SUSS MJB-3)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu
  2. [2]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu