Comparison ledger
Strasbaugh 100R16, Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100R16Strasbaugh | |
|---|---|---|
| OEM | Strasbaugh | Yaskawa |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Strasbaugh 100R16 | Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot |
| Specifications | ||
| type | 1 spindle grinder/polisher[1] | — |
| drive system | DC drive system with 2 motors[1] | — |
| spindle RPM | 1-180 RPM[1] | — |
| eccentric RPM | 1-90 RPM[1] | — |
| controls | digital timer; air down switch; spindle and eccentric speed dials; air regulators[1] | — |
| capacity | 16 inches[1] | — |
| spindle size | 1-8 TPI[1] | — |
| overall dimensions | 28 inches x 36 inches x 48 inches[1] | — |
| weight | 500 lbs[1] | — |
| origin | made in the USA[1] | — |
| Configuration | — | With XU-CM6180 Controller, Compatible with Ebara FREX 300 CMP[2] |
| Model | — | XU RSM 53 E 0[2] |
| Equipment type | — | Atmospheric Wafer Robot[2] |
| Category | — | CMP[3] |
| Wafer size | — | 12 inch[2] |
| Controller | — | XU-CM6180 Controller[3] |
| Compatibility | — | Compatible with Ebara FREX 300 CMP[2] |