Comparison ledger
Semitool SST C 421 280 Batch Wafer Processing, Tektronix 11401 Oscilloscope, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11401 OscilloscopeTektronix | |
|---|---|---|
| OEM | Semitool | Tektronix |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool SST C 421 280 Batch Wafer Processing | Tektronix 11401 Oscilloscope |
| Specifications | ||
| Wafer Size | 6 inch[1] | — |
| Vintage | 2004[3] | — |
| Power | 208 VAC[3] | — |
| Full Load Current | 30 A[2] | — |
| Largest Motor or Load | 10 A (15 HTR)[2] | — |
| Short Circuit Interrupt | 10,000 A[2] | — |
| Heat Exchanger | Present[3] | — |
| Vacuum | Present[3] | — |
| CDA | 65–70 PSI[3] | — |
| DI Water | 35 PSI Minimum[3] | — |
| Process Gas | N₂ / CO₂[3] | — |
| Condition Note | Visible Corrosion on Modules[3] | — |
| Missing Components | Wafer Handler, Power Supply, AC Distribution Box, External Transformer, UPS, Backing Pump(s), Shipping Brackets[3] | — |
| Voltage | 208 VAC[2] | — |
| Phase | 3 Phase[2] | — |
| Wafer Sizes | 6 inch, 8 inch (200mm)[2] | — |
| CDA Pressure | 65–70 PSI[3] | — |
| DI Water Pressure (Minimum) | 35 PSI[3] | — |
| Manufacturer | Semitool[2] | — |
| Model | SST C 421 280[2] | — |
| Frequency | 50/60 Hz[2] | — |
| DI water pressure | 35 PSI minimum[3] | — |
| Version | 200mm[4] | — |
| Sales condition | as is where is[4] | — |
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