Waferpedia

Comparison ledger

11600 SRDversusST 270 D SRD

Semitool 11600 SRD, Semitool ST 270 D SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
ST 270 D SRDSemitool
OEMSemitoolSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDSemitool ST 270 D SRD
Cited variants—
  • ST-270D SRD Dual Stack Spin Rinser/Dryer[1]
Specifications
ConfigurationCeramic[2]—
ManufacturerSemitool[2]—
Model11600 SRD[2]ST 270 D[3]
Equipment typeSpin Rinse Dryer[2]Spin Rinse Dryer (SRD)[3]
OEM—Semitool[3]
Wafer size—5 inch[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]semistarcorp.comsemistarcorp.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing