Comparison ledger
Semitool 003163-000 SRD, Tokyo Electron Mark 7, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | Mark 7Tokyo Electron |
|---|---|---|
| OEM | Semitool | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Tokyo Electron Mark |
| Cited variants | — |
|
| Specifications | ||
| Make | Semitool[2] | — |
| Model | 003163-000[2] | — |
| Equipment type | Spin Rinse Dryer (SRD)[2] | — |
| Asset # | 139375[2] | — |
| Last Confirm Date | September 03, 2025[2] | — |
| Configuration | — | 1C2D[3] |
| Wafer size range | — | 5 inch to 8 inch[4] |
| Wafer transport | — | Vacuumless robotic transport[4] |
| Chuck types | — | Mechanical and vacuum chucks for top and back side cleaning[4] |
| Brush control | — | Automatic brush pressure controller[4] |
| Optional cleaning | — | Jet or megasonic cleaning[4] |
| Host communication | — | GEM host communication[4] |
| Interface | — | SMIF interface[4] |
| Compliance | — | S2-93 and CE mark[4] |
| Vintage | — | 2011 |
| Coaters & Developers Vintage | — | 2011 |
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