Comparison ledger
SCREEN FC 821 L, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FC 821 LSCREEN | 1000PYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Wafer Transfer Machine | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN FC 821 | YES 1000P |
| Specifications | ||
| Process | SiGe[1] | — |
| Configuration | Carrier Transfer Robot[1] | Parallel plate[3] |
| Wafer size | Wafer Transfer Machine[1] | — |
| Current | 3 φ 200 V, 125 A[1] | — |
| Model | — | 1000P[2] |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →