Comparison ledger
SCREEN FC 821 L, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FC 821 LSCREEN | 1000FPYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Wafer Transfer Machine | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN FC 821 | YES 1000FP |
| Specifications | ||
| Process | SiGe[1] | — |
| Configuration | Carrier Transfer Robot[1] | — |
| Wafer size | Wafer Transfer Machine[1] | — |
| Current | 3 φ 200 V, 125 A[1] | — |
| System type | — | Plasma cleaning system[2] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[2] |
| Model | — | Glen/YES 1000FP[2] |
| Designed use | — | Designed to accept a range of shelf sizes[2] |
| Application focus | — | Changing needs of the flat panel industry[2] |
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