Comparison ledger
Plasma-Therm Versalock 700 ICP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Versalock 700 ICPPlasma-Therm | 1512eTegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm Versalock 700 ICP | Tegal 1512e |
| Specifications | ||
| Configuration | Dual Chamber Etcher[1] | — |
| Phase | 3 Phase[2] | — |
| Frequency | 60 Hz[2] | — |
| Voltage | 208V[2] | — |
| Pumps | 3 Edward Pumps[1] | — |
| Chillers | 2 Neslab Chillers[1] | — |
| Control system update | Vortex Computer Update[1] | — |
| Vintage | 1998[2] | — |
| Tool type | — | Industrial RIE plasma etcher system[3] |
| Stated configuration | — | With modules assembly for CI-4222[3] |
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