Comparison ledger
Novellus 300, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 300Novellus | 1000PYES |
|---|---|---|
| OEM | Novellus | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 300mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Novellus 300 | YES 1000P |
| Specifications | ||
| Target tool size | 300 mm tools[1] | — |
| User interface | Proteus user interface[1] | — |
| Platform function | High-resolution data collection and management, advanced equipment applications, advanced factory automation, and remote e-diagnostics connectivity[1] | — |
| Modules | Athena Knowledge Base (AKB), Athena Advanced Factory Automation (AFA), Athena Remote (AR)[1] | — |
| AKB capabilities | Statistical Process control, equipment fault monitoring and notification, sensor integration, and remote connectivity for e-diagnostics[1] | — |
| AFA standards and interfaces | SEMI standards for Equipment Data Acquisition (EDA) "Interface A"; connections to Modbus and HSMS[1] | — |
| AR function | Enables access to the Novellus tool GUI and the ATHENA KB GUI from a computer outside of the cleanroom[1] | — |
| Model | — | 1000P[2] |
| System type | — | Plasma cleaning system[2] |
| Shelf configuration | — | Four 16 x 16 inch shelves[2] |
| Total capacity | — | 1024 square inches[2] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[2] |
| Number of shelves | — | 4[2] |
| Shelf size | — | 16 x 16 inches[2] |
| Power | — | 1000 W[3] |
| Configuration | — | Parallel plate[3] |
| Operation modes | — | Active, RIE, Downstream[2] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[2] |
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