Comparison ledger
Nikon NSR 2205 i 12 D i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Nikon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | Can produce wafer as-is | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1996 Vintage · 1999 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR 2205 | Ultratech 1000 Family |
| Specifications | ||
| Software Version | MCSV 2.41, OCSV 2.41[1] | — |
| CIM | SECS[1] | — |
| Process | Photolithography[1] | — |
| Factory Interface | Open Cassette (2)[1] | — |
| Configuration | Vax Station, Pin Chuck[1] | — |
| Handler Sytem | WL Type 3[1] | — |
| Power | 674mW/cm2 (at most recent lamp change in May 2025)[1] | — |
| Uniformity | 0.93% (at most recent lamp change in May 2025)[1] | — |
| TFD | 0.332um (July 2025)[1] | — |
| Astigmatism | 0.259um (July 2025)[1] | — |
| Tool type | i-Line Stepper[2] | Photolithography step-and-repeat 1X stepper[5] |
| Wafer size | 6 inch[2] | — |
| Controller/chuck | Vax Station, Pin Chuck[1] | — |
| Handler system | WL Type 3[1] | — |
| Category | i-line Stepper[1] | — |
| Wafer Sizes | 6 inch, 8 inch[2] | — |
| Vintage | 1996, 1999[1] | — |
| OEM | Nikon[2] | — |
| Model | NSR 2205 i 12 D[2] | — |
| Equipment type | i-Line Stepper[2] | — |
| Vax station | Pin Chuck[1] | — |
| Voltage | 208 V[4] | — |
| Phase | 3 Phase[4] | — |
| Handler options | SIC Substrate[4] | — |
| System SW (OS) Version | Nikon Nest[4] | — |
| Robot Type | OEM[4] | — |
| End Effecter Type | OEM[4] | — |
| Supporting Equipment | STD OEM items[4] | — |
| CDA | N2[4] | — |
| DIW | Chilled Water[4] | — |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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