Comparison ledger
Nikon NSR 2205 i 11 D i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Nikon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR 2205 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | With HDD & Software[1] | — |
| Lamp Power | 570.2 mW / cm2[1] | — |
| Uniformity | 1.17%[1] | — |
| TFD | 0.410 µm[1] | — |
| Astigmatism | 0.328 µm[1] | — |
| Make | Nikon[2] | — |
| Model | NSR 2205 i 11 D[2] | — |
| Type | i-line stepper[2] | — |
| Wafer size | 4 inch[2] | — |
| Vintage | 1995[2] | — |
| Included accessories | HDD and software[1] | — |
| Stepping 3 sigma X | 17 nm[1] | — |
| Stepping 3 sigma Y | 20 nm[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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