Comparison ledger
Mattson 8800, YES 450PB, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8800Mattson | 450PBYES |
|---|---|---|
| OEM | Mattson | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | 200mm | 200mm |
| Process node | 0.25-micron | — |
| Introduced | 1997 | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1997 Award recognition · 1997 Product award | — |
| Control system | — | — |
| Generation | third-generation | — |
| Family | Mattson 8800 | YES 450PB |
| Cited variants | — |
|
| Specifications | ||
| Tool type | Third-generation RTP tool[2] | — |
| Process target | 0.25-micron process requirements[2] | — |
| Wafer size | 200 mm[2] | 200 mm wafers[1] |
| Wafer format | Single-wafer[2] | — |
| Temperature performance | Improves temperature uniformity and repeatability[2] | — |
| Throughput | Significantly boosts throughput[2] | — |
| Ceramic Shield option | Backside emissivity independence and better wafer-to-wafer repeatability[2] | — |
| Nitrogen curtain | Minimum pre-purge time and high-throughput configuration[2] | — |
| High process purge gas flow | Fast chamber purging for high-throughput configuration[2] | — |
| ez-DTC | High-throughput configuration and improved control[2] | — |
| High temperature end effector | High-throughput configuration[2] | — |
| Double O-ring seal system | Prevents product loss[2] | — |
| Swivel cassettes with independent swivels | Higher throughput[2] | — |
| Standard slip-free ring package | High temperature slip-free processing and improved uniformity[2] | — |
| Certifications | CE certified and UL listed[2] | — |
| Generation | third-generation RTP tool[2] | — |
| Process node | 0.25-micron[2] | — |
| Award | Semiconductor International Editor's Choice Best Product Award (1997)[2] | — |
| Series type | — | MEMS high vacuum cure ovens[1] |
| Maximum process temperature | — | Up to 450°C[1] |
| High vacuum | — | 10-6[1] |
| Pressure range | — | 50-500 Torr[3] |
| Laminar flow pressure range | — | 0.50-500 Torr[3] |
| Process gases | — | Up to four process gases[3] |
| Cooling package | — | Air-only cooling package; no water[1] |
| Cassette construction | — | 316L SST welded, electro-polished construction with no screws or fasteners[4] |
| Cassette temperature suitability | — | 316L SST suitable up to 760°C; recommended continuous operating temperature without distortion is 500°C[4] |
| Cassette sizes | — | 25-wafer cassettes: 2 inch, 3 inch, 100mm, 125mm, 150mm, 150mm short, 200mm, 200mm short, 300mm, and 300mm load port; 13-wafer cassettes: 300 mm and 300mm load port[4] |
| Equipment type | — | High vacuum cure oven series[1] |
| Maximum operating temperature | — | up to 450°C[1] |
| Laminar flow | — | vertical laminar airflow[1] |
| High vacuum variant | — | YES-450PB-HV[1] |
| High vacuum level | — | 10-6 Torr[1] |
| Cassette material | — | 316L stainless steel, welded and electro-polished construction[4] |
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