Comparison ledger
Laurell H6-15 B, Laurell WS-650-15B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | H6-15 BLaurell | WS-650-15BLaurell |
|---|---|---|
| OEM | Laurell | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Laurell H6-15 B | Laurell WS-650-15B |
| Specifications | ||
| Model | H6-15 B[1] | — |
| Type | Spin Coater[1] | — |
| Controller | 650-series[1] | — |
| Max. Substrate Size | 300mm (9" x 9")[1] | — |
| Max. RPM | 12000 rpm[1] | — |
| Mounting Options | Tabletop, In-Deck, On-deck[1] | — |
| Model type | — | spin coater[2] |
| Series | — | 650 Series[2] |
| Max substrate size | — | 300mm (9" x 9")[2] |
| Max RPM | — | 12,000 rpm[2] |
| Mounting options | — | Tabletop, In-Deck, On-Deck[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →