Comparison ledger
Lapmaster 120 Continuous, Strasbaugh 6 DS SP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 ContinuousLapmaster | 6 DS SPStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | Single Wafer SiC Substrate |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 120 Continuous | Strasbaugh 6 DS SP |
| Specifications | ||
| Configuration | — | Multi Process[1] |
| Voltage | — | 208 V, 3 Phase, 60 Hz[2] |
| Full Load | — | 60 A[2] |
| Motor | — | 36 A[2] |
| Interrupting Capacity | — | 10,000 A[2] |
| Wafer size | — | Single Wafer SiC Substrate[2] |