Waferpedia

Comparison ledger

12 LapperversusEP1

Lapmaster 12 Lapper, Logitech EP1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
EP1Logitech
OEMLapmasterLogitech
CategoryCMPCMP
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Logitech EP1
Specifications
Outside plate diameter12 inches[1]—
Lapping Speed Range0 to 60 rpm[2]—
Wafer Size Compatibility4 inches or smaller[1]—
Input Voltage110 V[1]—
Frequency60 Hz[1]—
Phase1[1]—
Number of Rings3[1]—
Number of Weights3[1]—
Includes Slurry SystemYes[1]—
Includes TimerYes[1]—
Product family—EP Polishing Pads and Cloths[3]
Application type—Chemical Mechanical Polishing (CMP)[3]
Suitable applications—oxide, nitride and copper[3]
Type—Chemical Mechanical Polishing (CMP) cloths and pads[3]
Suitable materials—Oxide, nitride and copper[3]
Product type—Chemical Mechanical Polishing (CMP) polishing cloths and pads[3]
Applications—oxide, nitride, and copper[3]
Associated wafer process capacity—up to 100mm/4"[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org