Comparison ledger
Lam Research Rainbow 9600 SE II TCP, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 9600 SE II TCPLam Research | 1512eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow | Tegal 1512e |
| Specifications | ||
| Configuration | With DSQ[1] | — |
| Wafer Type | Flat[1] | — |
| Vlave Type | VAT Pendulum Valve 65 Series[1] | — |
| SMIF | No[1] | — |
| Bulkhead | Wall Facia are Missing[1] | — |
| Monochromator Endpoint | Dual Endpoint Detector - Lam # 853 001983 110[1] | — |
| Software | E 2.0.1-044[1] | — |
| RF | 3X on Board Trumpf Generators (Top, Bias, DSQ)[1] | — |
| Cart | No[1] | — |
| Robot Type | Harmonic Drive[1] | — |
| Loader Type | Hine Indexers 38 A[1] | — |
| Turbo Pumps | Alcatel ATH 1300 MT[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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