Waferpedia

Comparison ledger

IPEC 372 Mversus1 DP 41

Lam Research IPEC 372 M, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC 372 MLam Research
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 372 MLogitech 1 DP 41
Specifications
CategoryCMP[1]—
Wafer Size8 inch (200 mm)[1]—
TypeAutomated Wafer Polishing System[2]—
OEMLam Research[1]—
ModelIPEC 372 M[3]1 DP 41[4]
Wafer sizes8 inch[3]—
Tool typeAutomated wafer polishing system[1]—
Also referred to asIPEC 372M Avanti[1]—
Phase—3 Phase[4]
Configuration—50/60 Hz[4]
Voltage—480 V[4]
Make—Logitech[4]
Frequency—50/60 Hz[4]
Current—12 amps[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing