Comparison ledger
Lam Research Gasonics Aura 1000, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics Aura 1000Lam Research | 1000FPYES |
|---|---|---|
| OEM | Lam Research | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics Aura 1000 | YES 1000FP |
| Specifications | ||
| Configuration | Tabletop (4)[1] | — |
| Configurations | Tabletop (4) or Floor (1)[1] | — |
| Power Requirement | 208VAC 3-Phase[2] | — |
| Process Gases | O2, CF4[2] | — |
| Plasma Source | Microwave (magnetron)[2] | — |
| Chamber Material | Ceramic/Quartz[2] | — |
| Pneumatics Power | Nitrogen or Clean Dry Air (CDA)[2] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Model | — | Glen/YES 1000FP[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
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