Comparison ledger
Lam Research 9600 Metal, Tegal 1511e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9600 MetalLam Research | 1511eTegal |
|---|---|---|
| OEM | Lam Research | Tegal |
| Category | Etch | Etch |
| Wafer size | Wafer chambers | three- to six-inch wafers |
| Process node | — | — |
| Introduced | — | 1984 |
| Production run | — | 1984– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research TCP 9600 | Tegal 1511e |
| Specifications | ||
| Configuration | Etch strip[1] | — |
| Wafer size | Wafer chambers[1] | — |
| Chemistry | BCL3, C2, SF6, HE, AR[1] | — |
| Operating System | Lam Special[1] | — |
| Model | 9600 Metal[1] | — |
| Make | Lam[1] | — |
| Category | Etch[2] | — |
| Wafer handling | Wafer chambers[2] | — |
| tool type | — | tri-electrode dual-frequency plasma etch system[3] |
| wafer size | — | three- to six-inch wafers[3] |
| first sold | — | 1984[3] |
| system characteristic | — | first vacuum-loadlocked dual-frequency tri-electrode etch system[3] |
| First vacuum-loadlocked dual-frequency tri-electrode etch system | — | Yes[3] |
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