Comparison ledger
Kurt Lesker Nano36, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Nano36Kurt Lesker | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | Kurt Lesker | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Kurt Lesker Nano36 | Thermo Fisher 1300 |
| Specifications | ||
| OEM | Kurt J Lesker[1] | — |
| Model | Nano36 Thermal Deposition System[1] | — |
| Equipment type | Cleanroom Instrumentation[1] | — |
| Process category | Thin Film Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Equipment Type | Cleanroom Instrumentation; Thin Film Fabrication[2] | — |
| Deposition type | thermal deposition of metals[2] | — |
| Substrate size | up to 150 mm in diameter[2] | — |
| Automated process control | KJL eKLipse software with a graphical recipe builder[2] | — |
| Deposition sources | two thermal sources for co-deposition and four sources for sequential deposition[2] | — |
| Source characteristics | DC power supply rated up to 12 V or 400 A; maximum applied power 2 kW[2] | — |
| Shutters and shielding | substrate and source shutters with cross-contamination shields[2] | — |
| Substrate rotation | up to 20 rpm[2] | — |
| Thickness monitoring | two crystal sensors with controller-based deposition rate and film thickness control[2] | — |
| System base pressure | 5.0 × 10^-6 Torr[2] | — |
| Film uniformity | <8%[2] | — |
| Configuration | — | Class II[3] |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[4] |
| Airflow compensation | — | SmartFlow airflow compensation system[4] |
| Motors | — | Dual DC motors[4] |
| Front window design | — | SmartClean front window design[4] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4] |
| UV light | — | Programmable UV light[4] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[4] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[4] |
| Front opening choices | — | 8-inch or 10-inch front opening[4] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[5] |
| Certification | — | NSF/ANSI 49, UL, CE[5] |
| Service valves | — | Up to 6 total, 3 on each side wall[5] |
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