Comparison ledger
KLA .498 PSL Wafer, Zeiss Merlin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MerlinZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Zeiss Merlin |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| NIST traceability | Yes[1] | — |
| Instrument type | — | Scanning electron microscope (SEM)[2] |
| Column | — | GEMINI II[2] |
| Stage | — | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[2] |
| Loadlock | — | Semi-automatic airlock[2] |
| Control software | — | ZeissSmartSEM[2] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[2] |
| Holders | — | Mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detector | — | In-Lens detector[2] |
| Software for offline analysis and metrology | — | ProSEM software[2] |
| Electron optical column | — | GEMINI II[2] |
| Sample holders | — | mono samples, cleaved samples, full 4 inch wafer[2] |
| Detector types | — | In-Lens, HE-SE2, EsB, EDX[2] |
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