Waferpedia

Comparison ledger

.498 PSL Waferversus9000

KLA .498 PSL Wafer, Nanometrics 9000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
9000Nanometrics
OEMKLANanometrics
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Windows NT
Generation——
FamilyKLA .498 PSL WaferNanometrics 9000
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Platform—Metrology software[2]
Operating system—Windows XP-based[2]
Software architecture—Multi-tasking, multi-threaded[3]
User interface compliance—SEMI E95-0200 compliant user interface[3]
Supported systems—Nanometrics 9000, 9100, 9200, and 9300 systems[3]
Capabilities—Simultaneous wafer recipe development and wafer processing[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org