Comparison ledger
KLA .496 PSL Wafer, KLA P/N: 0023889-00 Wafer Vacuum Chuck, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA P/N: 0023889-00 Wafer Vacuum Chuck |
| Specifications | ||
| Configuration | NIST Traceable[1] | Compatible with KLA SP1 Classic // SP1-TBi //SP1-DLS[3] |
| Wafer size | 8 inch[1] | 150mm / 200mm Wafer Vacuum Chuck[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →