Comparison ledger
KLA .496 PSL Wafer, KLA INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | INS 3000KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA INS 3000 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | 2.5X/ 5X/ 20X/ 50X/ 100X/ 150X[4] |
| Wafer size | 8 inch[2] | 200mm wafers[1] |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| Missing Parts | — | LFS+Z2 PCB x1ea[4] |
| Wafer Size | — | 200mm[1] |
| Objective Magnifications Available | — | 2.5X, 5X, 20X, 50X, 100X, 150X[4] |
| Product type | — | Automated optical defect review system[1] |
| Series | — | INS3x00 series[1] |
| Magnification | — | 2.5X, 5X, 20X, 50X, 100X, 150X[4] |
| System type | — | Automated optical defect review[1] |
| Vintage year | — | 1999[4] |
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