Waferpedia

Comparison ledger

.204 PSL WaferversusHRP 340 Surface

KLA .204 PSL Wafer, KLA HRP 340 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA HRP 340
Specifications
ConfigurationNIST Traceable[1]Bad Load port[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
OS—Windows XP[4]
Vertical Range—0-131 um[4]
Style Force—0.05-15 mg[4]
Stylus—2.0 um / 60[4]
Wafer size—PSL Standard 8 inch Wafer (9400 A Standard)[4]
OEM—KLA[3]
Model—HRP 340 Surface[3]
Category—Metrology & Inspection[5]
Model designation—HRP340[6]
Description—Surface profilometer[3]
Status—Sold[6]
Vintage—2007[6]
Condition—Excellent[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]jenesisequipment.comjenesisequipment.com