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.204 PSL Waferversus2135 Brightfield

KLA .204 PSL Wafer, KLA 2135 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
2135 BrightfieldKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA 21xx
Specifications
ConfigurationNIST Traceable[1]Refurbished[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
Voltage—208 Vac[4]
Phase—3 Phase[5]
Frequency—50/60 Hz[4]
Current—30 amps[4]
Input Voltage—208 Vac[4]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing