Waferpedia

Comparison ledger

1007versusContura G 2 CMM

KLA 1007, Zeiss Contura G 2 CMM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLAZeiss
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Zeiss Contura G 2 CMM
Specifications
ManufacturerKLA[1]Zeiss[3]
Model1007[1]Contura G 2[3]
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]Coordinate Measuring Machine (CMM)[3]
Configuration—7.7.6 RDS[3]
Software—Calypso 2019[3]
Measuring Range—700 x 700 x 600 mm[4]
Category—Dimensional Calibrators[5]
Probe head—RDS Probe Head[3]
Scanning probe—Vast XXT Scanning Probe[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]microprecision.commicroprecision.com