Comparison ledger
KLA 1007, Micro-Vu Excel 664 UC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Excel 664 UCMicro-Vu |
|---|---|---|
| OEM | KLA | Micro-Vu |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Micro-Vu Excel 664 UC |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | With Touch Probes[3] |
| Control & software | — | W 11 PC[4] |
| Configuration & options | — | With Touch Probes[4] |
| Touch probe kit | — | Renishaw TP20-4 Touch Probe Kit with 4 port Change Rack[5] |
| Software | — | Inspec v.2.9710[5] |
| Measurement capacity | — | 650 x 680 x 400 mm[6] |
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