Comparison ledger
KLA 1.112 PSL Wafer, Olympus MX 61 F, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MX 61 FOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Olympus MX 61 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Optics UIS Optics[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Optics | — | UIS Optics[3] |
| Wafer loader | — | Loader AL 110[4] |
| Stand | — | Microscope stand[3] |
| Nosepiece | — | Nosepiece[3] |
| Observation tube | — | Observation tube[3] |
| Stage | — | Stage[3] |
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