Waferpedia

Comparison ledger

1.112 PSL WaferversusSMZ-2B

KLA 1.112 PSL Wafer, Nikon SMZ-2B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SMZ-2BNikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferNikon SMZ-2B
Specifications
ConfigurationNIST Traceable[1]Desk mount boom stand or base plate boom stand[4]
Wafer Size8 inch[1]—
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
OEM—Nikon[3]
Model—SMZ-2B[3]
Section—Binocular Model[3]
Location—Z17[3]
Microscope Type—Stereo[4]
Observation Method—Reflected light[4]
Magnification Range—8 - 50X (typical factory)[4]
Height—9.38 in[4]
Width—12 in[4]
Depth—7.25 in[4]
Power Requirements—115V[4]
Observation mode—Reflected light observation[4]
Typical factory magnification—8-50X[4]
Light source compatibility—High intensity light source[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]epfl.chepfl.ch
  4. [4]labwrench.comlabwrench.com