Comparison ledger
KLA 1.112 PSL Wafer, KLA Surfscan SP 1 TBI Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | 208-240 V[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Full Load | — | 24 A[3] |
| Machine Main Breaker Rating | — | 30 A[3] |
| Rating of Largest Load | — | 12 A (laser)[3] |
| Phase | — | 1 Phase[4] |
| OEM | — | KLA[3] |
| Model | — | Surfscan SP 1 TBI[3] |
| Wafer sizes | — | 8 inch, 12 inch[5] |
| Wafer size (single configuration) | — | 12 inch[4] |
| Input power | — | 208-240 V, single phase, 50/60 Hz[3] |
| Full load current | — | 24 A[3] |
| Wafer loading | — | Single FOUP loader[4] |
| Main Breaker Rating | — | 30 A[6] |
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