Comparison ledger
KLA 1.112 PSL Wafer, KLA P 17 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P 17 SurfaceKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA P |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | 50/60 Hz[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Phase | — | 1 Phase[4] |
| Tool type | — | Surface profilometer[6] |
| Wafer sizes | — | 4 inch, 6 inch, 8 inch, 12 inch[5] |
| Step height measurement range | — | A few nanometers to 1 millimeter[1] |
| Scan length | — | Up to 200 mm without stitching[1] |
| Measurement modes | — | 2D and 3D[1] |
| Measured quantities | — | Step height, roughness, bow, stress, defect review[1] |
| Measurement method | — | Stylus profiler[6] |
| Power | — | 1 phase[4] |
| Frequency | — | 50/60 Hz[4] |
| Wires | — | 3 wires[4] |
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