Comparison ledger
Kensington WFH 4 C Wafer Robot, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WFH 4 C Wafer RobotKensington | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | Kensington | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Kensington WFH | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | with aligner[1] | — |
| Wafer size | 6 inch[1] | — |
| Aligner | Included[1] | — |
| Category | Lithography[2] | — |
| Manufacturer | Kensington[1] | — |
| Model | WFH 4 C[1] | — |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →