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Comparison ledger

SU 3800 VP Electronversus0035235-003 MMD Head

Hitachi SU 3800 VP Electron, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi SU 3800 VP ElectronKLA 0035235-003 MMD Head
Specifications
P/N52 E 4918[1]—
Configuration100 to 240 V[1]TSTD PCB ASSY, MMD MEAS HEAD[2]
Current1.5 KVA[1]—
Part Number52 E 4918[1]—
Power Voltage100 to 240 V[1]—
Frequency50/60 Hz[1]—
PhaseSingle Phase[1]—
KVA1.5[1]—
Vintage2021[1]—
Included AccessoriesMonitors, Control Panel, Track Ball, Sample Mounts, Cables, Hoses, Extra Filaments, Vacuum Pump, Air Compressor, CDs/DVDs for SEM Communication Setup[1]—
Not IncludedEDS, Plasma Cleaner[1]—
Model—0035235-003[2]
Make—KLA[2]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[2]
Compatible System—KLA AIT-XP[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing