Comparison ledger
Hitachi S 8820 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 8820 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 8820 CD-SEM | KLA .496 PSL Wafer |
| Specifications | ||
| Missing Parts | HV Controller, Monitor[1] | — |
| Configuration | Flat edge type[2] | NIST Traceable[8] |
| Robot & Pri-Aligner | MECS UTC 100, OF 250[2] | — |
| Gun Tip Type | Denka 174DH[2] | — |
| Image Resolution | 5 nm (800V)[2] | — |
| Accelerating Voltage | 500V to 1300V (10V step)[2] | — |
| Electron Optic System | 3 stage lens systems (retarding method)[2] | — |
| Measure Repeatability | 3 sigma 1% or 5 nano[2] | — |
| CD Measurement Range | 0.1 ~ 10 micro[2] | — |
| Magnification | OM mode : x 100, SEM mode : x 300 ~ 200,000[2] | — |
| Throughput | 25 wafer/hour, 5point[2] | — |
| OS version | HP-UNIX 9.05[2] | — |
| SEM Version | Ver 9.25[2] | — |
| EWS | HP 715-33 with 4:3 LCD type monitor[2] | — |
| Vacuum system | 3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[2] | — |
| Stage system | X-Y 200mm Full range automatic motor driving[2] | — |
| Wafer sizes supported | 6 inch and 8 inch[5] | — |
| Tool type | CD-SEM (Critical Dimension Scanning Electron Microscope)[6] | — |
| OEM | Hitachi[6] | — |
| Model | S 8820[6] | — |
| Type | CD-SEM (Critical Dimension Scanning Electron Microscope)[6] | — |
| Wafer size | 6 inch[7] | 8 inch[8] |
| Category | Critical Dimension Scanning Electron Microscope[6] | Metrology & Inspection[9] |
| Wafer sizes | 6 inch; 8 inch[7] | — |
| Vintage year | 1995[6] | — |
| Equipment type | Critical Dimension Scanning Electron Microscope[6] | — |
| Vintage | 1995[6] | — |
| Traceability | — | NIST Traceable[8] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[8] |
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