Comparison ledger
Hitachi S 5000 FE-SEM, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 5000 FE-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1998 Vintage stated | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 5000 FE-SEM | KLA .498 PSL Wafer |
| Specifications | ||
| Tool type | Field Emission Scanning Electron Microscope (FE-SEM)[1] | — |
| Accelerating voltage | 30 kV[2] | — |
| Magnification | 500,000x[2] | — |
| Performance image resolution | 0.6 nm at 30 kV; 3.5 nm at 1 kV in secondary electron image[2] | — |
| Electron gun | Cold field emission source[2] | — |
| Accelerating voltage range | 0.5 to 30 kV in 0.1 kV steps[2] | — |
| Specimen stage motion | X ±3.5 mm continuous; Y ±2 mm continuous; tilt ±40 degrees continuous[2] | — |
| Specimen size | 9.5 mm x 5 mm x 2.4 mm for standard holder; 20 mm x 6 mm x 2.4 mm maximum for larger specimen holder[2] | — |
| Specimen exchange | Airlock type with prepumping[2] | — |
| Vacuum pumps | IP1 60 l/s; IP2 20 l/s; IP3 20 l/s; TMP 340 l/s; RP 140 l/min (168 l/min) x 2 sets[2] | — |
| Standard equipment | Column, display unit, power supply, S-5080 camera, air compressor, rotary pumps, standard tool, spares and consumables, instruction manual, auto transformer[2] | — |
| Dimensions and weight - column | 89(w) x 103(d) x 160(h) cm; 385 kg[2] | — |
| Dimensions and weight - display | 110(w) x 90(d) x 116(h) cm; 235 kg[2] | — |
| Dimensions and weight - power supply | 54(w) x 63(d) x 150(h) cm; 215 kg[2] | — |
| Dimensions and weight - rotary pump | 54(w) x 22(d) x 41(h) cm; 32 kg x 2 sets[2] | — |
| Dimensions and weight - air compressor | 40(w) x 23(d) x 55(h) cm; 18 kg[2] | — |
| Dimensions and weight - auto transformer | 33(w) x 35(d) x 38(h) cm; 72 kg[2] | — |
| Configuration | — | NIST Traceable[3] |
| NIST traceability | — | Yes[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →